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Silane CVD Rotary Furnace

High-temperature sintering furnace is a vacuum degreasing sintering furnace, which is mainly used in silicon carbide recrystallization sintering furnace, and can also be used in silicon carbide reaction sintering furnace, silicon carbide degreasing sintering furnace and other fields.

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Applications:

A professional silane CVD equipment for silicon-based anode materials of new energy battery.

 

Max Working Temperature

2400°C

Temperature Uniformity

±10°C

Working Atmosphere

High Vacuum (Optional) / Vacuum / Inert Gas (Ar or N2)

Supply Voltage

3P, 380V, 50Hz/60Hz

Features

Heating Hethod: Resistance heat
Atmosphere: Argon, Acetylene, Silane
Temperature Uniformity: ±10°C
Rotating Speed: 0.15~1.7 rpm (adjustable by frequency conversion);
Slope: -2 to 14 degrees (adjustable)

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